Create space inside the semiconductor manufacturing equipment with slim relays and door interlock switches

Repeated design improvements have ensured that there is no wasted space inside the equipment

In order to better utilize limited clean room space, it is important for semiconductor manufacturing equipment to be made more compact and multi-functional.
However, it is extremely difficult to further improve on existing equipment that has already been designed to be as compact and multi-functional as possible. Such equipment usually has strict internal space restrictions, and limited freedom to modify the design. Although it is possible to completely redesign such equipment, this requires considerable use of economic and labor resources. It is not uncommon for semiconductor manufacturing equipment design engineers to be faced with such problems.

The industry's thinnest relays and the world's thinnest door interlock switches allow flexibility in design