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Compact Safety Door Switches | EMEA

Contributes to downsizing of semiconductor manufacturing equipment. Thinnest safety door switches on the market.

Downsizing equipment used inside clean rooms

As clean rooms cannot be easily expanded, the demand for downsizing of equipment is high to utilize limited space. However, even if downsizing is mechanically possible, the size of each part becomes a bottleneck and equipment cannot be made smaller in many cases. For example, when using parts that comply with SEMI standards, by considering safety, it is difficult to find the appropriate size for parts and end up wasting space. Many of the semiconductor manufacturing equipment manufacturers most likely want to use small parts.

Thinnest door lock switches in its class expand flexibility in design
Here’s a more specific example. Semiconductor manufacturing equipment that operates long hours has doors on all four sides to confirm the operation status and for maintenance purposes. Each door is required to have a door interlock switch on the inside of the door to ensure safety during opening and closing. If the door interlock switches can be downsized, more space inside the equipment becomes available, allowing for smaller equipment design. Many designers may have given up on designing smaller doors on equipment because they could not find small door interlock switches.
To support customers solve this issue, IDEC introduced the HS6E and HS6B door interlock switches that are the thinnest safety door switches currently on the market. As both door switches can be installed in three directions, flexible installation is possible. Five different types of actuators are available and therefore, the most appropriate actuator can be used on various doors such as sliding or swing doors. Also, the door switches comply with SEMI standards to ensure safety performance.

Two types of safety door switches are available
IDEC has two types of miniature safety switches for installation in equipment. Depending on the risk assessment at customer sites, HS6E door interlock switches with solenoid and HS6B door switches without lock function can be selected. IDEC is a specialist on safety and switches, and can provide your company with consulting on safety solutions including strict safety standards such as ISO and SEMI. Please contact IDEC you have any concerns about safety.